- Among Taiwan’s equipment manufacturers, the vacuum coating industry equipment models and processes have the highest coverage and the equipment has sales performance, and has the SECS & CIM automation experience & SEMI S2 semiconductor equipment certification of the whole plant.
- Effectively execute cavity simulation design, aiming at high output (Short tact time), execute simulation data establishment including pumping speed and cavity stress tolerance.
- Integration capability: PEM reactive coating process control system / optical film coating system. In line sputter system’s automatic trolley chasing control system, the trolley spacing can be controlled to <=20mm.
- Master Cathode’s design and development capabilities, and can correspond to different magnetic field designs according to process requirements, and the actual mass production uniformity can be controlled ≤ 3~5%.
- The equipment maintenance platform is designed to shorten the time required for PM and improve equipment utilization.
- Set up a permanent service base to provide quick spare parts & complete repair services.
