Roll-To-Roll sputter system
- Category : Vacuum sputter system, Vacuum system
- Feature of product:
- The plasma cleaning process is combined.
- The design of the isolation sub-chamber can be planned to meet the coexistence of multiple sputter processes in one machine architecture.
- Customized design to meet process requirements.
- Hanging type loading and unloading mechanism and CIM planning function included.
- Chamber door can be full open and easy to maintenance.
- Customized deposition effective area and process.
- Process and industry:
- Metal sputter process / reactive sputter process / oxide sputter process.
- PET Optical / active and passive component / touch sensor / Cu layer and other industries.
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