Cluster Sputter System
- Category : Vacuum sputter system, Vacuum system
- Feature of product:
- Semiconductor sputter process with EFEM system.
- SECS and CIM function included.
- Easy to maintenance.
- Customized design to meet process requirements.
- Process and industry:
- Metal sputter process / oxide sputter process / Meta sputter process.
- Chip bonding / solar cell and other industries.
- Product Gallery:
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