Laser (laser) optical evaporation system
- Category : Vacuum evaporation system, Vacuum system
- Feature of product:
- The machine is suitable for academic, research and industrial use.
- The substrate size is 2~8 inch wafer.
- The substrate has the function of vacuum reversal coating, and the reversal stability is good.
- Customized machine design, which can be designed according to customer requirements.
- It has the function of ion circle assist plating.
- Optical monitoring function can be installed according to customer needs
- 製程與產業:
- Optical evaporation process / Laser Bar evaporation process
- AR/HR optical multilayer digital film evaporation process
- Laser Bar AR/HR multilayer optical evaporation process
- Research machines for academic and research circles
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