Optical Cluster Evaporation System
枚叶式蒸镀镀膜设备
- Category : Cluster optical evaporation system, Vacuum system
- Feature of product:
- Semiconductor optical evaporation process with EFEM system.
- Dual E-Beam with IAD source, high deposition rate and high throughput.
- Auto filler of Ta3O5 source included.
- SECS and CIM function included.
- Easy to maintenance.
- Customized design to meet process requirements.
- Process and industry:
- Oxide evaporation process.
- Semiconductor optical / band pass filter / AR layer of cover glass / color coating and other industries.
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