Optical Cluster Sputter System
- Category : Cluster optical evaporation system, Vacuum system
- Feature of product:
- Semiconductor optical process with EFEM system.
- META process design of metal coating + ICP oxidation/nitridation improves, high deposition rate and high throughput.
- SECS and CIM function included.
- Easy to maintenance.
- Customized design to meet process requirements.
- Process and industry:
- Metal sputter process / oxide sputter process / Meta sputter process.
- Semiconductor optical / band pass filter / color coating and other industries.
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